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On the Lithographic Fabrication of Fe and Co Nanostructures. Properties and Applications of the Structures
В наличии
Местонахождение: Алматы | Состояние экземпляра: новый |
Бумажная
версия
версия
Автор: Fan Tu
ISBN: 9786139821761
Год издания: 2018
Формат книги: 60×90/16 (145×215 мм)
Количество страниц: 172
Издательство: LAP LAMBERT Academic Publishing
Цена: 39286 тг
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Аннотация: Semiconductor industry drives and also benefits a lot from the development of nanotechnology. As predicted by Moore’s law, the number of individual nano-components such as transistors on a chip is still rising, increasing the density of functional entities and thus improving the computational power. One powerful method for the controlled fabrication on the nanometer scale is focused electron beam induced processing (FEBIP). Therein, a focused electron beam is used to locally modify the properties of a substrate, enabling the fabrication of nanostructures with arbitrary shape and controlled chemical composition. The most frequently applied and prominent FEBIP technique is electron beam induced deposition (EBID), in which certain precursor molecules are locally dissociated by the impact of the electron beam, leading to the deposition of the nonvolatile fragments of the precursors. In this book, investigations were carried out in fabrication and application of the nanostructure by EBID.
Ключевые слова: catalysts, CNTs, Magnetic nanostructures, surface chemistry, Surface Science, Synchrotron, X-ray Absorption Spectroscopy, Focused Electron Beam Induced Processing, Focused Electron Beam Induced Deposition, Nanolithography, Mask Repair, STXM, X-ray Microscopy, NEXAFS