Low loss Mg2TiO4 based microwave ceramics: Bulk and Thin Films. Case Study

      Аннотация: Magnesium orthotitanate (Mg2TiO4) is recognized as one of the most promising low loss microwave dielectric material having wide range of applications as microwave resonators, oscillators, amplifiers, filters, radar, GPS patch antenna etc. This book gives an over view of different synthesis and characterization techniques used for both bulk and thin films of Mg2TiO4 based microwave ceramics. A systematic study of effect of different processing conditions and smaller initial particle size on crystal structure, microstructure and on microwave dielectric properties have been reported. The microwave dielectric properties measured at room temperature as well as low temperatures were discussed in detailed. Furthermore, Mg2TiO4 thin films were deposited by RF magnetron sputtering from the home made sputtering target over various substrates like, Si (100), quartz and on platinized silicon (Pt/TiO2/SiO2/Si)). The impacts of processing parameters (Ar/O2 ratio) and post deposition annealing on structural, microstructural, optical and dielectric properties of Mg2TiO4 films were investigated and discussed in detailed.

Ключевые слова: Low loss Mg2TiO4 based microwave ceramics, bulk and thin films