Ultra thin film deposition and Evaluation Using SAM. Ultra-Thin Film Deposition of Nickel, Cobalt and Nickel-Cobalt and Evaluation Using Scanning Acoustic Microscopy

      Аннотация: In the present investigation a combination of two techniquest: a classic one for the deposition of ultra thin films (i.e., electroless deposition) and a complementary non-destructive (NDE) technique for quality evaluation of the deposited films have been used for nickel-cobalt ultra thin films. The present research project focuses on the application of a nondestructive method (i.e., scanning acoustic microscopy (SAM) to evaluate the quality of nickel cobalt ultra thin films grown on a dielectric substrate. The developed method is useful for further improvement of designing and manufacturing of the films. Visualizing micro cracks and delaminations provide information about adhesion within thin films system.

Ключевые слова: Ultra-Thin, film deposition, Scanning, Acoustic, microscopy